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Lavorro · Fleet view · EtchETCH-07 CH-B down
142RF power alarms across the etch fleet
1.6×last 30 days vs. the 30 before
69%from one chamber, ETCH‑07 B
Top chambers, alarms per day■ RF FWD PWR out of range

What it meansOne chamber carries most of the fleet's alarms, so it's a chamber problem, not a fleet-wide one. Both of its bursts were followed by a work order.

What fixed it last time

Replace the RF match capacitor. It cleared this alarm on CH-B in August; the September match check didn't.

  • WO-48213 · Aug · capacitor replaced · worked
  • WO-48390 · Sep · match network check
  • Manual §7.4 · RF match service
Illustrative example · your fleet's own alarms and work orders · runs inside your fab

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